Abstract:
In this study, through the analysis of the performance requirements of quartz products in different links of the semiconductor process, the optimization of high-precision machining processes, the thermoforming technology of quartz products, the polishing and annealing process of quartz products, etc.Quartz products.The results of this research can effectively replace imported products, increase the localization rate, revitalize the national industry, and promote the healthy development of my country's semiconductor integrated circuits and the national electronic information industry.