大尺寸二维氧化镓的制备及性能研究

Preparation and properties of the large-scale two-dimensional gallium oxide

  • 摘要: 二维宽禁带材料在制作下一代新型电子器件上能发挥重要作用,宽禁带的氧化镓晶体具有非层状结构,难以通过机械剥离等传统方法制成二维材料,二维超薄氧化镓的制备和性能研究很有限。本文利用挤压液态金属镓的方法成功制成大尺寸超薄氧化镓膜,膜的横向尺寸在厘米量级,厚度在~5.6 nm。选用适当大小的液态金属镓能改善二维氧化镓膜的均匀性和边缘规则性,通过按压多个液态金属镓滴可以实现更大面积二维氧化镓膜的制备。通过透射电镜和拉曼光谱检测结果可以确认制备的材料是非晶的Ga2O3膜。电学检测结果说明通过超声清洗可以去除二维氧化镓表面残留金属镓,实现提高材料绝缘性能的目的,这也说明制备的二维氧化镓在光传感器和需要绝缘材料的电学器件中能发挥重要作用。

     

    Abstract: Two-dimensional(2D) wide bandgap materials will play an important role in the production of the next generation of new electronic devices. Wide bandgap gallium oxide crystals have a non-layered structure and are difficult to be made into 2D materials via traditional preparation methods, such as mechanical exfoliation. Here, the large-scale ultra-thin gallium oxide film was fabricated by squeezing liquid metal gallium. The size of the film is on the centimeter-scale and its thickness is ~5.6 nm. The thickness uniformity and edge regularity of 2D gallium oxide films can be improved by selecting the liquid gallium with an appropriate size. A larger 2D gallium oxide film can be prepared by squeezing multiple liquid gallium droplets. The transmission electron microscopy and Raman results confirm that the fabricated material is the amorphous Ga2O3 film. The electrical results show that the ultrasonic cleaning can remove the residual gallium on the surface of the 2D gallium oxide and improve the insulativity of the film. The 2D gallium oxide with excellent insulativity is suitable for photodetectors and some electrical devices requiring insulating materials.

     

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