半导体型乙醇传感器研究近况

Recent Research on Semiconductor-based Ethanol Sensors

  • 摘要: 气体传感器在现代科学技术领域发挥着重要作用,它们被广泛用于公共安全、污染监测、呼吸分析、智能家居等。由于其低成本、高灵敏度、易制造的优势,促使众多研究人员对气体传感器展开广泛研究。尤其是金属氧化物半导体(MOS)型气体传感器,此类传感器可检测150多种有毒有害气体,对具有易挥发、易燃易爆性质的乙醇(C2H5OH)有机挥发性气体(VOCs)具有良好的气敏特性。本文回顾了近一年来最先进的MOS电阻型乙醇传感器,详细阐述了传感器对乙醇气体的传感机制;重点介绍了不同MOS型传感器对乙醇的敏感特性,分析了诸如金属掺杂、异质结复合材料以及MOS分等级结构对乙醇传感器性能的影响。通过分析可得,SnO2、ZnO基传感器对乙醇的传感性能最佳,特别是经金属掺杂和由不同导电类型半导体构建的异质结MOS传感器。

     

    Abstract: Gas sensors play an important role in modern science and technology; they are widely used in public safety, pollution monitoring, respiratory analysis, smart homes, etc. Their low cost, high sensitivity and ease of manufacture have prompted many researchers to conduct extensive research on gas sensors. In particular, metal oxide semiconductor(MOS) type gas sensors, which can detect more than 150 toxic and hazardous gases, have good gas-sensing properties for organic volatile gases(VOCs) such as ethanol(C2H5OH), which is volatile and flammable and explosive in nature. This paper reviews the state-of-the-art MOS resistive ethanol sensors in the last year and details the sensing mechanism of the sensors for ethanol gas; it highlights the sensitive characteristics of different MOS-based sensors for ethanol and analyses the effects of, for example, metal doping, heterojunction composites and MOS hierarchical structures on the performance of ethanol sensors. The analysis shows that SnO2 and ZnO-based sensors have the best sensing performance to ethanol, especially MOS sensors doped with metals and constructed heterojunction from different conductive types of semiconductors.

     

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