基于压电陶瓷泡沫的加速度传感器研究

Accelerometer based on niobium-doped lead zirconate titanate piezoelectric ceramic foam

  • 摘要: 传统压电材料的低柔性与高压电性能具有相互制约的关系,限制了压电式加速度传感器的性能。因此,为了调和这种矛盾,利用聚氨脂泡沫作为模版制备了一种具有三维互连结构的Nb0.02-Pb (Zr0.6Ti0.4) O3(PNZT)压电陶瓷泡沫,并利用其设计和制作了一种压电式加速度传感器,实验测试了加速度频率响应、动态响应和灵敏度等特性。实验结果表明,该加速度传感器的灵敏度约为0.4mV/g,线性度可达99.4%。

     

    Abstract: The low flexibility and high piezoelectricity properties of traditional piezoelectric materials are mutually restricted, which limits the performance of piezoelectric acceleration sensors.Therefore, in order to reconcile this contradiction, a kind of Nb0.02-Pb(Zr0.6Ti0.4)O3(PNZT) piezoelectric ceramic foam with a three-dimensional interconnection structure was prepared using polyurethane foam as a template.A piezoelectric accelerometer is designed and fabricated by this kind of PNZT foam.The characteristics of frequency response, dynamic response and sensitivity to acceleration were tested experimentally.The experimental results show that the sensitivity of the acceleration sensor is about 0.4mV/g, and the linearity can reach 99.4%.

     

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