Abstract: This study proposes a novel composite nanoimprint film structure, based on a sandwich structure, using elastic silicone to wrap a flexible non expanding planar substrate. The process includes coating liquid silicone on the graphic substrate and curing it, accurately placing a flexible non expanding flat substrate, and finally coating a layer of silicone to form a sandwich structure of silicone imprinting area/flexible substrate/silicone protection area. This technology solves the problem of difficulty in peeling off a single flexible material and the line width fluctuation caused by the expansion phenomenon during the embossing process of elastic materials.