高稳定性In2O3/InGaZnO双层沟道薄膜晶体管研究

High-stability In2O3/InGaZnO dual-channel thin-film transistors

  • 摘要: 提出并构建了一种基于In2O3/IGZO双层沟道的薄膜晶体管(Thin Film Transistor, TFT)。实验结果表明,该双层结构器件展现出优异的电学性能和稳定性:场效应迁移率高达26.8 cm2/V·s,亚阈值摆幅低至90.8 mV/dec;在正偏压应力和负偏压应力条件下,阈值电压漂移(ΔVth)分别仅为29.6 mV和−89.3 mV。此外,经50天高湿环境存储后,其电学特性未出现显著退化。上述卓越性能主要归因于物理气相沉积的IGZO层与原子层沉积的In2O3有源层之间形成了高质量界面,同时IGZO层有效阻隔了环境中水汽和氧气对In2O3层的侵蚀作用。因此,所提出的双层沟道技术为开发高性能氧化物薄膜晶体管提供了重要途径,在先进电子器件领域具有广阔的应用前景。

     

    Abstract: This study proposes and fabricates an In2O3/IGZO dual-channel TFT. The results indicate that the bilayer device exhibits excellent electrical characteristics and stability, including a high field-effect mobility of 26.8 cm²/V·s and an ultralow subthreshold swing of 90.8 mV/dec. The threshold voltage shifts (ΔVth) under positive bias stress and negative bias stress are only 29.6 mV and −89.3 mV, respectively. After 50 days of storage in a humid environment, no significant degradation in electrical performance is observed. These outstanding electrical properties and stability are attributed to the high-quality interface formed between the physical-vapor-deposited IGZO layer and the atomic-layer-deposited In2O3 layer. Furthermore, the IGZO layer effectively prevents the interaction between environmental moisture/oxygen and the In2O3 layer. The proposed dual-channel technology offers an effective solution for achieving high-performance oxide thin-film transistors, demonstrating considerable application potential in advanced electronic devices.

     

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