Abstract:
This study proposes and fabricates an In
2O
3/IGZO dual-channel TFT. The results indicate that the bilayer device exhibits excellent electrical characteristics and stability, including a high field-effect mobility of 26.8 cm²/V·s and an ultralow subthreshold swing of 90.8 mV/dec. The threshold voltage shifts (Δ
Vth) under positive bias stress and negative bias stress are only 29.6 mV and −89.3 mV, respectively. After 50 days of storage in a humid environment, no significant degradation in electrical performance is observed. These outstanding electrical properties and stability are attributed to the high-quality interface formed between the physical-vapor-deposited IGZO layer and the atomic-layer-deposited In
2O
3 layer. Furthermore, the IGZO layer effectively prevents the interaction between environmental moisture/oxygen and the In
2O
3 layer. The proposed dual-channel technology offers an effective solution for achieving high-performance oxide thin-film transistors, demonstrating considerable application potential in advanced electronic devices.