激光刻蚀对金刚石薄膜的制备及场发射的影响

Effect of laser etching on the preparation and field emission of diamond films

  • 摘要: 本文研究了激光刻蚀衬底对制备金刚石薄膜的影响,研究了激光刻蚀金刚石薄膜对它的影响,通过扫描电镜、拉曼光谱、X射线实验,检测了衬底及碳膜的形貌与结构,最后利用场发射二级结构研究碳膜的场发射性能。简单分析了激光刻蚀对金刚石薄膜的制备和场发射性能的影响。

     

    Abstract: In this paper, the influence of laser etching on the preparation of diamond film was studied, the influence of laser etching on diamond film was studied, the morphology and structure of the substrate and carbon film were detected by scanning electron microscope, Raman spectrum and X-ray experiment, and finally the field emission properties of carbon film were studied by using the field emission secondary structure. The effects of laser etching on the preparation and field emission properties of diamond films are simply analyzed.

     

/

返回文章
返回