大气压粉末原子层沉积研究进展

Development and applications of atmospheric pressure particle atomic layer deposition

  • 摘要: 大气压粉末原子层沉积技术是能在大气压或者临近大气压条件下,对功能粉末材料表面进行纳米级厚度精确修饰的技术,在能源材料、催化剂材料等领域具有广阔的应用前景。该技术省略了真空系统,节省了设备成本和维护成本,在工业放大生产领域具有明显优势。本文介绍了粉末原子层沉积自限制性表面化学反应的基本原理、对纳米粉末进行原子层沉积需要克服的困难、以及大气压粉末原子层沉积的优劣势;接着,概述了原子层沉积的保形性,总结了大气压下工作的时间原子层沉积反应腔和空间原子层沉积反应腔设计及其高通量粉末处理差异,进而介绍了大气压粉末原子层沉积在催化、药物输运、锂电池等领域的应用;最后,对大气压粉末原子层沉积未来可能的研究方向进行了展望。

     

    Abstract: Atmospheric pressure particle atomic layer deposition (AP-PALD) shows promising potentials in the fields of energy and catalytic materials due to its capability in precisely modifying the surfaces of functional materials operated at atmospheric or near-atmospheric pressure. This technique eliminates the usage of vacuum system, resulting in saving the costs of equipment and maintenance, and thereby exhibits great advantages in scale-up solutions. This paper reviews the fundamentals of self-terminating surface reactions on particles via ALD, challenges needing to be overcome, and pros and cons of AP-PALD. Then, the conformality of ALD has been overviewed briefly, followed by the development of reactor designs for temporal ALD (t-ALD) and spatial ALD (s-ALD) operated at atmospheric pressure together with the comparison about processing of high-throughput particles using t-ALD and s-ALD. Also, the applications of AP-PALD used in catalytic materials, drug delivery, Li-ion batteries, and etc. have been summarized. Finally, the perspectives of AP-PALD have been addressed.

     

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