Abstract: This study introduces a method for preparing vertically oriented CNTs on silicon tips, aimed at meeting the application requirements of AFM probes. Initially, a silicon tip array with a height of approximately 6 μm was fabricated through optimized mask design and KOH wet etching. Subsequently, a stamping technique was utilized to selectively deposit ferritin molecules as catalysts on the apex of the silicon tips. Finally, thermal CVD with optimized parameters was employed to successfully grow single vertically aligned CNTs, with a diameter ranging from 15 to 20 nm, on the silicon tips. Characterization via SEM and TEM confirmed the uniform structure and high crystallinity of the CNTs. Additionally, Raman spectroscopy further verified their high degree of graphitization. This study offers a practical technical solution for the fabrication of high-performance AFM probes, demonstrating substantial application potential.