栅调控多晶硅电导及场发射特性研究

Study on Gate-Controlled Electrical Conductivity and Field Emission Characteristics of Polycrystalline Silicon

  • 摘要: 采用工艺简单且与集成电路工艺兼容的多晶硅作为阴极制备平面电子管,可显著简化平面电子管的制造工艺并降低制造成本,有望推动平面电子管集成电路的发展。为研究多晶硅作为阴极的平面电子管场发射特性及其调控机制,本文首先通过测试流过多晶硅薄膜的电流大小,分析了多晶硅薄膜电子密度在背栅调控下的变化规律,并探讨了漏极电压对调控效果的影响。在此基础上,进一步研究了多晶硅阴极场发射电流与背栅调控电压之间的关系,实现了背栅对多晶硅阴极场发射电流的有效调控,同时验证了多晶硅阴极场发射电流特性与电子密度之间的正相关性。上述研究为多晶硅平面电子管的研制提供了理论基础。

     

    Abstract: Polycrystalline Silicon (poly-Si), known for its straightforward fabrication process and compatibility with integrated circuit (IC) technology, is utilized as the cathode material to construct planar electron tubes. This approach simplifies the device manufacturing process, reduces production costs, and holds potential for advancing the development of planar electron tube ICs. To explore the field emission properties and modulation mechanisms of planar electron tubes with poly-Si cathodes, this study first investigates the variation in electron density within poly-Si thin films under back-gate modulation by measuring the current passing through them. Additionally, the influence of the drain voltage on the modulation effect is examined. Based on these findings, the relationship between the field emission current of poly-Si cathodes and the back-gate modulation voltage is analyzed, demonstrating the ability to control the field emission current of poly-Si cathodes via the back-gate. A positive correlation is observed between the field emission current characteristics of poly-Si cathodes and their electron concentration. These results provide a foundation for the advancement of poly-Si-based planar electron tubes.

     

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