Abstract: Three-dimensional（3 D） microstructures with feature lengths from nanometer to micrometer scale exhibit various and unique properties and functions, and have been becoming key building blocks for the next-generation devices. In this work, nanocrystalline diamond nanomembranes with 100 nanometers were constructed into complex 3 D microstructures via stress engineering, including micro-tubes, micro-rings, micro-jagged ribbons and micro-helix. The detachment of diamond nanomembranes from the substrate induced by surface tension of ethanol is observed. Furthermore, the WGM spectral characteristic and enhanced color center photoluminescence of diamond tubular microcavity was investigated, and the effective regulation of high order resonance mode was realized through fine structure design.