Abstract: The structure analysis of components is one of the important technologies for reliability evaluation of components. This paper presents a structure analysis technique of digital isolator, analysed the structure of GLc7640C and ISO7640FM, established the structure analysis scheme of the digital isolator, including structural unit, structural elements, analysis process, formed conclusion and report, and proved the feasibility of the technology. The related factors that affect reliability are found and suggestions are given. This paper provides a reference mode for the structural analysis of similar devices.