The research of a novel electro-magnetically actuated valveless micropump

A novel electro-magnetically actuated valveless micropump which is suitable for microfluidic system is presented.The MEMS technology is adopted to fabricate the cavity,diffuser and nozzle of the micropump.The flat vibration motor is used as the actuator,and the flexible polydimethylsiloxane（PDMS） is used as the vibration membrane.The size of the micropump is 12mm×12mm×5mm.The vibration frequency and the flow rate of the micropump are measured,and the result shows that the voltage has significant influence on them.When a voltage of 1.5V is applied,the maximum flow rate reaches 158μL/min.