Analysis of the response of MEMS bi-stable electromagnetic microrelay

The design of a novel bi-stable micro electro mechanical system（MEMS） electromagnetic microrelay is presented and the factors impacting the response of the miniaturized device are analyzed.The test results show that the microrelay can keep stable states without other power consumption and the response can be increased by tuning the operation distance of the rotor.The minimum response is up to 0.3ms.